Piezo stages

Mainly based on the APA® concept, CEDRAT TECHNOLOGIES has developed different mechanisms in order to fulfill its customers’ requests for several degrees of freedom kinematics. These mechanisms take advantage of the APA® concept offering a reliable, robust, precise and compact solution to its users. The Commercially Of The Shelves (COTS) Solutions for X, XY & XYZ stages are presented below. A dedicated brochure “XY stages Heritage” presents the customized and OEM XY stages solutions already delivered by CTEC to the Space, Electro-Optic & Scientific Instrumentation markets.

  • X piezo stages: single axis piezo stages take advantage from the characteristics of APA® actuators and flexure guiding to offer excellent compactness, robustness, bandwidth and resolution.
  • XY piezo stages: the two axis stages can be equipped with strain gauges for very fine positioning or closed loop control.
  • XYZ piezo stages: two axis stages can receive athird motion axis for three degrees freedom.

X60S

Piezo Stage

x60s web

Additional information

Max-no-load-displacement

55 µm

Unloaded-resonance-frequency

1840 Hz

Response-time

0,27 ms

Dimensions

30mm*30mm*12mm

Available options

Strain gauge, Vacuum Compatibility

Status

Standard

X120S

Piezo Stage

x120s web

Additional information

Max-no-load-displacement

110 µm

Unloaded-resonance-frequency

850 Hz

Response-time

0,59 ms

Dimensions

30mm*30mm*12mm

Available options

Strain gauge, Vacuum Compatibility

Status

Standard

XY25XS

Piezo Stage

xy25xs sg web

Additional information

Max-no-load-displacement

25 µm

Unloaded-resonance-frequency

3000 Hz

Response-time

0,17 ms

Dimensions

50mm*550mm*19mm

Available options

Strain gauge, Vacuum Compatibility

Status

Standard

XY200M

Piezo Stage

xy200m web

Additional information

Max-no-load-displacement

200 µm

Unloaded-resonance-frequency

580 Hz

Response-time

0,86 ms

Dimensions

100mm*100mm*22mm

Available options

Strain gauge, Vacuum Compatibility

Status

Standard

XYZ200M

Piezo Stage

photo of a xyz200m

Additional information

Max-no-load-displacement

200 µm

Unloaded-resonance-frequency

380 Hz

Response-time

1,32 ms

Dimensions

100mm*100mm*49mm

Available options

Strain gauge, Vacuum Compatibility

Status

Standard