The piezoelectric stage XYZ200M is based on APA 200M actuators and possesses a high stiffness. Applications include confocal microscopy, mask positioning, inspection.
| Max-no-load-displacement | 200 µm |
|---|---|
| Unloaded-resonance-frequency | 380 Hz |
| Response-time | 1,32 ms |
| Dimensions | 100mm*100mm*49mm |
| Available options | Strain gauge, Vacuum Compatibility |
| Status | Standard |
