The piezoelectric stage X60S has a stroke up to 55µm along the X axis and can be equipped with strain gauges for a very fine accuracy up to 10 nm.
| Max-no-load-displacement | 55 µm |
|---|---|
| Unloaded-resonance-frequency | 1840 Hz |
| Response-time | 0,27 ms |
| Dimensions | 30mm*30mm*12mm |
| Available options | Strain gauge, Vacuum Compatibility |
| Status | Standard |
| Max-no-load-displacement | 110 µm |
|---|---|
| Unloaded-resonance-frequency | 850 Hz |
| Response-time | 0,59 ms |
| Dimensions | 30mm*30mm*12mm |
| Available options | Strain gauge, Vacuum Compatibility |
| Status | Standard |
