The piezoelectric stage XY200M is based on the APA 200M actuators and possesses a high stiffness. Applications include mask positioning, atomic force or scanning tunneling microscopes.
| Max-no-load-displacement | 200 µm |
|---|---|
| Unloaded-resonance-frequency | 580 Hz |
| Response-time | 0,86 ms |
| Dimensions | 100mm*100mm*22mm |
| Available options | Strain gauge, Vacuum Compatibility |
| Status | Standard |
| Max-no-load-displacement | 25 µm |
|---|---|
| Unloaded-resonance-frequency | 3000 Hz |
| Response-time | 0,17 ms |
| Dimensions | 50mm*550mm*19mm |
| Available options | Strain gauge, Vacuum Compatibility |
| Status | Standard |
